Thin Film Deposition Evaporators

Compact Systems
Thin Film Evaporators
Coating Systems
Deposition Systems

Innovative Technology Inc thin film deposition systems are engineered for use in academic research, as well as in large-scale industrial applications.

Producing multi-thin film layers requires Inert atmospheric conditions of <1 ppm of O₂ and H₂O and a continuous particulate free environment provided in all of Innovative Technology, Inc Glove Box Systems. Innovative Technology Inc OLED/PLED thin film evaporative Glove Boxes provide the necessary atmospheric conditions required for the deposition of multilayer thin films; without disturbing intermediate layers caused by physical or chemical absorption.

Innovative Technology, Inc thin film deposition systems and Glove Boxes are extremely dependable systems that are capable of achieving coating uniformities of <5% in semiconductor device fabrication applications. Configurations range from bell jars to automatic loading chamber systems in Glove Boxes for the coating of wafers (and other applications) ranging in size from 2" to 300mm.

Innovative Technology, Inc Glove Box Vacuum Coating Systems are utilized in a variety of leading edge research fields.

Applications

Thermal Resistive Evaporation
Sputter Deposition / Sputtering
Electron Beam Evaporation (eBeam)
Laser Ablation / Pulsed Laser Deposition (PLD)
Thermal Space Simulation / Altitude Testing
Thermal Evaporation
Direct Current DC Sputtering
Radio Frequency RF Sputtering
Electron Beam Evaporation
DC and RF Sputter Deposition
Combined Resistive Sputter and Electron Beam
In Situ Substrate Heating up to 600°C
Glow Discharge Plasma Cleaning
OLED and LED Research and Fabrication
Thin Film Photovoltaic Research and Development
Thin Film Nanotechnology
Materials Research
Lens Coating
Semiconductor
Memory Storage Devices
Organic Research and Technology
Thin Film Medical Devices
Pharmaceutical Applications
Metallization

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For More Information, Please Call (978) 462-4415 Whatever your specific glovebox system & gas purification needs may be, look to Innovative Technology to fulfill them!