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Vacuum Coating System
The Amod line of thin film deposition
tools was designed to meet the
advanced process requirements of
today’s thin film research. Our flagship
line is fully customizable and can even
be combined as part of a multi-system
configuration. Our in-house developed
control software smoothly integrates
various system components, keeping
the right information at your fingertips.
Applications
Thermal Resistive Evaporation
Sputter Deposition / Sputtering
Electron Beam Evaporation (eBeam)
Laser Ablation / Pulsed Laser Deposition (PLD)
Thermal Space Simulation / Altitude Testing
Thermal Evaporation
Direct Current DC Sputtering
Radio Frequency RF Sputtering
Electron Beam Evaporation
DC and RF Sputter Deposition
Combined Resistive Sputter and Electron Beam
In Situ Substrate Heating up to 600°C
Glow Discharge Plasma Cleaning
OLED and LED Research and Fabrication
Thin Film Photovoltaic Research and Development
Thin Film Nanotechnology
Materials Research
Lens Coating
Semiconductor
Memory Storage Devices
Organic Research and Technology
Thin Film Medical Devices
Pharmaceutical Applications
Metallization

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Submit a quotation request online:
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For More Information, Please Call (978) 462-4415
Whatever your specific glovebox system & gas purification needs may be, look to Innovative Technology to fulfill them!
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Innovative Technology, Inc.
One Industrial Way
Amesbury, Massachusetts
Phone: (978) 462-4415
Fax: (978) 462-3338
Online:
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MIT
Harvard
Broad Institute of Harvard & MIT
Boston University
NYU
Stanford University
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Indiana University
University of Chicago
University of Toronto
University of British Columbia
Liverpool University
Cambridge University
University of Strathclyde
University of Graz
Rohm & Haas
SAFC
Air Liquide
Astra Zeneca
Amgen
NASA
Memorial Sloan Kettering Cancer Center
Dana Farber Cancer Center
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