Vacuum Deposition System

The next evolution in vacuum thin film deposition technology is here! EvoVac deposition systems are designed specifically to meet the demands of next generation research applications.

The modular design of the EvoVac will enable you to configure a system that has the flexibility to change along with your research. The base configuration of an EvoVac consists of two main sections, a standard 19" electrical control rack and a frame to support deposition sources, the high vacuum chamber and the PLC electronics.

The unique design of the EvoVac chamber enables glove box integration similar to our Amod Series. With an optional glove box an EvoVac system is perfectly suited for larger scale laboratory research applications highly sensitive to atmospheric conditions.

Applications

Thermal Resistive Evaporation
Sputter Deposition / Sputtering
Electron Beam Evaporation (eBeam)
Laser Ablation / Pulsed Laser Deposition (PLD)
Thermal Space Simulation / Altitude Testing
Thermal Evaporation
Direct Current DC Sputtering
Radio Frequency RF Sputtering
Electron Beam Evaporation
DC and RF Sputter Deposition
Combined Resistive Sputter and Electron Beam
In Situ Substrate Heating up to 600°C
Glow Discharge Plasma Cleaning
OLED and LED Research and Fabrication
Thin Film Photovoltaic Research and Development
Thin Film Nanotechnology
Materials Research
Lens Coating
Semiconductor
Memory Storage Devices
Organic Research and Technology
Thin Film Medical Devices
Pharmaceutical Applications
Metallization

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For More Information, Please Call (978) 462-4415 Whatever your specific glovebox system & gas purification needs may be, look to Innovative Technology to fulfill them!